there have been a few people that have reported this. I was unable to replicate this issue to find a work around. I might suggest for you to hard reset your device, re-enter safestrap recovery... activate a different ROM slot, then delete the previous ROM slot you tried flashing in.... set up a new partition (choose atleast 2GB partition), and then choose to install the ROM. (always make sure to wipe what i have listed and in the order as listed, stated in the OP..., Wipe data, then wipe cache, then dalvik, and then system.... i like to repeat this, so go once more around clockwise.... data/cache/dalvik and then system, then install the HDish v2.1.
Btw if you running the 98.72.16 system/kernel on your stock side, and using safestrap 3.11. .. you really shouldnt have any problems getting the ROM to install~ but if and when ever in doubt.... definitely try and delete the entire ROM slot and then setup from scratch! always worth a shot**
happened to me too but i figured it was a fluke and didnt report it since people have been getting this to work on their razrs. I knew it was better to try fix it by doing the basic steps which is what you posted. still did not work. not until i wiped my internal storage. not sure if that was the fix because i was doing the above mentioned steps by andlaw at the same time. so it could be one of many methods.
p.s. this was immediately after applying the ota from ics to jb .16, and following the proper steps to do so and restoring root with voodoo. which everything worked btw